Published By National Aeronautics and Space Administration
Issued about 9 years ago
US
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Summary
Description
A microsensor cell with interdigitated micron-size three electrode structure cell of thin film platinum sensing and counter electrodes and platinum pseudo or silver quasi reference electrodes deposited on silicon dioxide over silicon will be fabricated. A unique thin film composite polymer membrane electrolyte with high ionic conductivity and wide voltage window and hydrophobic property will be prepared and characterized and coated on the electrodes of the cell. The prototype sensor will be assembled in a suitable container covered with thin film PTFE membrane and feasibility demonstrated for sensing oxygen, water vapor and carbon dioxide.