Bronze level automatically awarded US beta

This data has achieved Bronze level on 23 October 2015 which means this data makes a great start at the basics of publishing open data.

High Resolution Silicon Deformable Mirrors Project

Summary

Type of release
a one-off release of a single dataset

Data Licence
Not Applicable

Content Licence
Creative Commons CCZero

Verification
automatically awarded

Release Date
9 April 2015
Modified Date
8 July 2015
Publishers
National Aeronautics and Space Administration
Keywords
completed, jet-propulsion-laboratory, project
Identifier
high-resolution-silicon-deformable-mirrors-project-590be
Landing Page
http://techport.nasa.gov/view/5811
Maintainers
Paul Bierden pab@bostonmicromachines.com
Language
en-US

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Description

This proposal describes a plan to build a prototype small stroke, high precision deformable mirror suitable for space-based operation in systems for high-resolution imaging. The prototype DM will be fabricated through a novel combination of micromachining and wafer bonding steps, and will rely on single crystal silicon for all structural components, promising unprecedented thermal stability and optical quality. These DMs will have a 65 mm aperture diameter, 4096 of degrees of freedom, 1?m of stroke, and a highly reflective mirror surface that can be adjusted repeatably to within 1nm RMS over the controllable range of spatial frequencies. The device will address all fundamental requirements for DMs to be used in space-based applications, by combining the best features of conventional discretely-assembled macroscale DMs (e.g. large aperture, good optical quality, and high reliability) with the best features of integrated microelectromechanical system (MEMS) DMs fabricated using semiconductor processing techniques (e.g. nanometer-scale repeatability, scalability to >104 actuators, and compactness). By using the full area of a silicon wafer for each mirror, these MEMS DMs will be significantly larger than any previously-reported MEMS DM. The device architecture will parallel that of the highly successful commercial MEMS DMs that were pioneered by Boston Micromachines Corporation.

Información General

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This dataset has been created by US Government which means it is required to be in the public domain. However US copyright law only allows open access by US citizens, we have assumed the data is equivalently licensed as CC0 for the rest of the world as this is in the spirit of the US Government’s Open Data policy.

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