Datasets / Nanospec Reflectometer: Nanometrics Nanospec/AFT

Nanospec Reflectometer: Nanometrics Nanospec/AFT

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Published By Federal Laboratory Consortium

Issued over 9 years ago

US
beta

Summary

Type of release
a one-off release of a set of related datasets

Data Licence
Not Applicable

Content Licence
Creative Commons CCZero

Verification
automatically awarded

Description

Description: Needs Description. Scientific Opportunities / Applications: Measures thickness of fils such as silicon dioxide, photoresist and nitride

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