Summary

Description

The laboratory includes approximately 1,700 square feet of specialized clean-room space up to class 100, plus 1500 sq. ft. of clean-room space housing associated equipment. This area is divided into three separate laboratory areas: mask making and photolithography, mask aligners and spinners for layering of EO polymer materials, and micromachining (DRIE, RIE, and Ion milling) and thin-film metals and dielectric materials deposition. Also, housed in this complex are precision surface analysis instruments (mechanical and optical surface profilers), a scanning electron microscope, and a flip-chip bonder.